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Additive Device

Micro-nano






Piezoelectric spraying systemUAI120/130

Uai120 / 130 series piezoelectric spraying instrument system adopts closed desktopoverall design, compact structure andThe self-developed precision filmpreparation technology, combined with precision motion control, can realize highperformance film preparation. product.It is mainly used in the development of new thin film solar cells, fuel cells, transparent conductive films and MEMS photoresist coating Covering research and other fields.For example: preparation of nano silver wire film, PEDOT: PSS film, graphene coating and perovskite coating Preparation, etc.

Product Details


 
Product characteristics    All process parameters are controlled integrally and the operation is simple
   The equipment integrates operation and control, and the overall structure is compact
   Single layer film thickness300μm-20μm
   Film uniformity is better than10%
   The material has strong adhesion, better than 4B (determined according to the material)
  A variety of ultrasonic nozzles can be selected
   Precision Three-Axis servo motion, motion accuracy is better than0.05mm
   Precision laser alignment system to complete rapid position calibration
   It is equipped with precision constant current feeding system and micro air flow control system
   Equipped with precision heating table, online adsorption and online sintering can be realized
   Equipped with vacuum adsorption table, it can meet the needs of flexible substrate
   Self equipped spraying chamber environment monitoring and optimization function
 
Application parameters When the square resistance is 50qcm / sq, the light transmittance of the coating is more than 82%. The average thickness of photoresist (rzj-304) double layer is 15um, and the layer uniformity is 13.2%

 


 
产品特性    各工艺参数一体化控制,操作简便
   设备将操作控制集成一体化,整体结构紧凑
   单层薄膜厚度300μm-20μm
   薄膜均匀性优于10%
   材料粘附力强,优于4B(具体根据材料确定)
   可选配多种超声喷头
   精密三轴伺服运动,运动精度优于0.05mm
   精密激光对位系统,完成快速位置标定
   配置精密恒流供料系统以及微气流控制系统
   配置精密加热台,可实现在线吸附、在线烧结
   配置真空吸附台,可满足柔性基底使用需求
   自带喷涂腔体环境监控及优化功能
 
应用参数    方阻50Qcm/sq,情况下,涂层透光率在82%以上。    光刻胶(RZJ-304)双层平均厚度15um,图层均匀性13.2%