Micro Instrument - Jiangsu Jicui Micro-Nano Automation System and Equipment Technology Research Institute Co., Ltd.

LIFEFORCE NANOMANIPULATION SYSTEM:LF-2000

TNI LF-2000 is the most automated SEM-based nanomanipulation system on the market. It is the only system that provides repeatable,drift free,closed-loop nano positioning inside SEM.

Product FEATURES

·  Optimized to probe sub-10nm process node devices;
·  Best positioning performance on market : long rang ; sub-nanometer resolution;
·  Position senors integrated for automated and programmable movements;
·  Optimized design for SEM vacuum environment; fast set-up and removal;

Case

Software Function

Parameter

MECHANICAL CHARACTERIZATIONS

LifeForce provides high resolution force and dis-placement feedback for
Reliable mechanical charac-terization feedback for reliable mechanical
Charac-terization of nanomaterials. Example images show nanoindentation of silicon nanowire forst with a ball ended AFM cantilever,and tensile testing of a single nanowire.

ELECTRICAL CHARACTERIZATIONS

LifeForce provides reliable,low noise electrical measurements of micro-nano materials;and in situ interactions with nano structures. Example images show 4-point probing and pizoresistivity testing of nanowires.

PICK-AND-PLACE

Using end-tools (e.g.,probes,micro-nanogrippers,ultrasonic cutters), operator can operate LifeForce to push,pull,grasp,cut various micro-nano objects inside SEM.

DEVICE PROTOTYPING

Precise manipulator movements enable rapid prototyping or post processing of micro-nano dvices. Example image shows the construc-tion of nanowire FET sensors.

NANOELECTRONICES PROBING

LifeForce is the only commercially available system that allows automated probing of electronic structures,ranging from sub-micromenters,sub--100nm,and sub-20nm,Positioning probes onto target locations is via computer mouse clicking.Exteremely low drift warrants reliable data collection.

力学测试
LifeForce为纳米材料的力学特性提供高分辨率的力和位移反馈，实例照片展示的是用球端AFM悬臂探针对硅纳米线簇进行纳米压痕，以及对单根纳米线的拉伸测试。

电学特征

LifeForce为纳米材料提供可靠、低噪音的电测量，以及与纳米结构的原位相互连接。实例照片展示的是四探针测量纳米线电学性能。

拾取和放置操作
使用末端工具（例如：探针、微纳米夹持器、超声切割针），操作者能够操作LifeForce纳米操作手在SEM电镜内对微纳米物体进行推、拉和抓取等操作。

制作微纳米器件

精密的操作手运动能够实现微纳米器件的快速成型和后处理。实例照片展示的是纳米线
FET传感器的构造。

纳米电子器件电学测量
LifeForce纳米操作机是是市面上能够自动探测电子结构（范围从亚微米，亚100nm及亚20nm）。只需要通过计算机点击鼠标，将探测针定位到目标位置。较低的定位漂移，保证数据采集的可靠性。

Position feedback	Provide XYZ precise position feedback for each manipulator, with 1 nm motion positioning resolution.
Save / load coordinates	Save and load the coordinates of multiple manipulators.
Automatic calibration	Maximizes positioning performance,and align manipulator motion axes to SEM image axes.
3D virtual display	Real-time 3D virtual space showing the manipulator(pink square)and sample(green plance)locations.
Click Move	On-screen mouse cliking to control manipulator movements.
Multi manipulator linkage	Link the motions of multiple manipulators with nanometer precision.
Picture video recording	Save pictures and videos of manipulation process high definitions.

System overview	System size	127X127X33 mm³*
System overview	Number of manipulators	1-4
Operator (macro)	Driving principle	Viscous drive
	Range of motion	XY axis：10mm Z axis：5mm
	Maximum speed	＞3mm/s
	Minimum step size	＜100nm
Operator (inching)	Driving principle	Frictionless flexure hinge
	Range of motion	XYZ axis：20μm
	Maximum speed	＞45μm/s
	Open loop motion resolution	0.5nm
	Closed loop motion resolution	1nm
	Positioning drift rate	＜0.35nm/min
Software function**	Click Move	Move the mouse from a to B on the computer screen
	Adaptive magnification	Positioner movement speed automatically adjusteding to SEM mangnification
	Manipulator position saving / loading	User defined "save / load" manipulator coordinates
	3D virtual display	Real time three-dimensional display of the position and motion of the manipulator
	Automatic calibration	automated manipulator sensor calibration
	auto alignment of motion axes	all manipulator motion axes auto aligned to SEM image axes

*system size down to 50x50x17mm³available upon request

**available on selected model of SEM/FIB