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Additive Device

Micro-nano



Automatic microscope

This automatic microscope is mainly used in semiconductor and 3C industries. Precise positioning of the platform through the XY axis
Positioning and auto focusing of z-axis make the components clearly appear in the field of view of the camera, and use autonomous
Develop multi-functional software to observe it.

 
Product characteristics
 
·X-Y positioning platform
Stroke range: 50mm × 50mm motion accuracy: 6um positioning accuracy: 10um repeated positioning accuracy: ± 5um Driving mode: stepping motor (including encoder)
·Scanning splicing: when the sample exceeds the field of vision, it can scan the local area of the sample and Splice to expand the field of view.
·Repeated positioning: when observing the sample, it is sometimes unclear which part you see, which can be clicked on the screen,Move to the position you are observing, and you won't be confused when observing.
·Depth synthesis: easily click the button to instantly obtain a fully focused image synthesized from images with different focal points To measure the depth information.
 

Product Details

Technical parameter

Travel range 50mmX50mm
Motion accuracy 6μm
positioning accuracy 10μm
Repeat positioning accuracy ±5μm
Movement mode Ball screw
Driving mode Stepper motor (including encoder)

  


Software features




Scanning splicing When the sample exceeds the field of vision, the field of vision can be expanded by scanning and splicing the local areas of the sample.
Repeat positioning When observing the sample, it is sometimes unclear which part you see. You can click on the screen and move to the position you are observing, so you won't be confused during observation.
One touch focus When the observation position of the sample is in the out of focus state, just click the button to easily realize the full range focusing state.
Real time observation Through simple mouse operation, real-time measurement can be carried out on the screen, such as distance, area, etc.

 



 

Technical parameter

Travel range 50mmX50mm
Motion accuracy 6μm
positioning accuracy 10μm
Repeat positioning accuracy ±5μm
Movement mode Ball screw
Driving mode Stepper motor (including encoder)

  


Software features


 
Scanning splicing: when the sample exceeds the field of vision, the field of vision can be expanded by scanning and splicing each local area of the sample.
Repeated positioning: when observing the sample, it is sometimes unclear which part you see. You can click on the screen and move to the position you are observing, so you won't be confused during observation.
One click focusing: when the observation position of the sample is in the out of focus state, just click the button to easily realize the full range focusing state.
Real time observation: through simple mouse operation, real-time measurement can be carried out on the screen, such as distance, area, etc.